機械研磨加工がシリコン単結晶の微構造に及ぼす影響

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Material Type: 文書・図像類
Title: 機械研磨加工がシリコン単結晶の微構造に及ぼす影響
Author/Editor: 高木, 誠
岩田, 博之
坂, 公恭
Author Heading: 高木, 誠
岩田, 博之
坂, 公恭
Publication, Distribution, etc.: 愛知工業大学
Publication Date: 2020-11
Publication Date (W3CDTF): 2020-11
Alternative Title: キカイケンマカコウガシリコンタンケッショウノビコウゾウニオヨボスエイキョウ
Periodical title: 総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
No. or year of volume/issue: 22
Volume: 22
Pages: 113-114
ISSN (Periodical Title): ISSN : 1344-9672
Text Language Code: jpn
Subject Heading: シリコン単結晶
研磨加工
透過型電子顕微鏡
Target Audience: 一般
Note (General): identifier:http://repository.aitech.ac.jp/dspace/handle/11133/3773
Access Restrictions: 限定公開
Periodical Title (NCID): AA11484797
https://ci.nii.ac.jp/ncid/AA11484797
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 愛知工業大学 : 愛知工業大学学術情報リポジトリ