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- Material Type
- 図書
- ISBN
- 978-4-8222-1347-3
- Title Transcription
- メムス テクノロジー : MEMS TECHNOLOGY : イノベーション ト イブンヤ ユウゴウ オ モタラス
- Volume
- 2008
- Author/Editor
- 日経マイクロデバイス 編日経エレクトロニクス 編
- Author Heading
- 日経マイクロデバイス編集部 ニッケイ マイクロ デバイス ヘンシュウブ日経エレクトロニクス編集部 ニッケイ エレクトロニクス ヘンシュウブ
- Publication, Distribution, etc.
- Publication Date (W3CDTF)
- 2007
- Extent
- 287p ; 28cm