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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Title
- Title Transcription
- ジツヨウ ウス バク プロセス : キノウ ソウセイ オウヨウ テンカイ
- Author/Editor
- 齊藤文良 編 ; 多賀康訓 編
- Title Heading
- 実用薄膜プロセス ジツヨウ ウス バク プロセス
- Publication, Distribution, etc.
- Publication Date
- 2009.8
- Publication Date (W3CDTF)
- 2009
- Extent
- ８，４１６ ; ２７ｃｍ