Planarization : CMP & its applications 6-7 20030000-20040000

Planarization : CMP & its applications

6-7 20030000-20040000

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Material Type: 雑誌
ISSN: 1345-6326
ISSN-L: 1345-6326
Title: Planarization : CMP & its applications
Volume: 6-7 20030000-20040000
Author Heading: 精密工学会セイミツコウガッカイ ( 00299339 )Authorities
Publication, Distribution, etc.: 福岡 : 精密工学会「プラナリゼーションCMPとその応用技術専門委員会」
Publication Date: 2003-2004
Publication Date (W3CDTF): 2003-2004
Note (Publication, distribution, etc.): 出版地の変更あり
Year and volume of publication: v. 1 (1998)-v. 14 (2012年版)
Size: 30cm
Place of Publication (Country Code): JP
Text Language Code: jpn
eng
NDLC: ZN12
ZN33
Note (General): 本タイトル等は最新号による
Holding library: 国立国会図書館
Call No.: Z74-B949
Related Material: 関連資料
https://ndlsearch.ndl.go.jp/books/R100000002-I024429068
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000108334
http://id.ndl.go.jp/bib/000000108334
National Bibliography No. (JPNO): 00114261
Cataloging Rule: National Diet Library Cataloging Rules for Serials
Bibliographic Record Category (NDL): 131