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Table of Contents
CONTENTS/
Semiconductors//1875~
Surface Effects on Leakage Current and Lifetime in Pt Diffused Planar Silicon p⁺n Diodes/Pahlawan SAGALA ; Chang SHU ; Hiroshi KUWANO/1875~
The Effects of Polishing Damage and Oxygen Concentration on Gate Oxide Integrity in Silicon Crystals/Takao ABE ; Yuichi KATO/1879~
Defect Evaluation of Heavily P-Doped Si Epitaxial Films Grown at Low Temperature/Ying JIA ; Takayuki OSHIMA ; Akira YAMADA ; Makoto KONAGAI ; Kiyoshi TAKAHASHI ; Shoichiro TANIGAWA ; Long WEI/1884~
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Bibliographic Record
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- Material Type
- 雑誌
- ISSN
- 0021-4922
- ISSN-L
- 0021-4922
- Volume
- Part. 1Part. 132(5A)(381);MAY 1993
- Part Title
- Regular papers, brief communications & review papers : JJAP
- Author Heading
- 応用物理学会 オウヨウ ブツリ ガッカイ ( 00281497 )Authorities
- Publication, Distribution, etc.
- Publication Date
- 1993-05
- Publication Date (W3CDTF)
- 1993-05