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国立国会図書館デジタルコレクション

光および電子線リソグラフィにおける解像特性の研究

Call No. (NDL): UT51-62-D525
Bibliographic ID of National Diet Library: 000000176765
Persistent ID (NDL): info:ndljp/pid/13039930

Material type: 博士論文

Author: 中瀬眞 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東北大学,工学博士

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Note (General)：: 博士論文

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Material Type: 博士論文
Title: 光および電子線リソグラフィにおける解像特性の研究
Title Transcription: ヒカリオヨビデンシセンリソグラフィニオケルカイゾウトクセイノケンキュウ
Author/Editor: 中瀬眞 [著]
Author Heading: 中瀬, 眞ナカセ, マコト
Extent: 冊
Degree grantor/type: 東北大学
Date Granted: 昭和62年2月12日
Date Granted (W3CDTF): 1987
Dissertation Number: 乙第4450号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-62-D525
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000176765
http://id.ndl.go.jp/bib/000000176765
Bibliographic Record Category (NDL): 213