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国立国会図書館デジタルコレクション

X線露光用マスク製作法の研究

Call No. (NDL): UT51-62-F159
Bibliographic ID of National Diet Library: 000000179080
Persistent ID (NDL): info:ndljp/pid/13040900

Material type: 博士論文

Author: 小野俊郎 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 北海道大学,工学博士

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Note (General)：: 博士論文

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Paper Digital

Material Type: 博士論文
Title: X線露光用マスク製作法の研究
Title Transcription: Xセンロコウヨウマスクセイサクホウノケンキュウ
Author/Editor: 小野俊郎 [著]
Author Heading: 小野, 俊郎オノ, トシロウ
Extent: 冊
Degree grantor/type: 北海道大学
Date Granted: 昭和62年3月25日
Date Granted (W3CDTF): 1987
Dissertation Number: 乙第3194号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-62-F159
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000179080
http://id.ndl.go.jp/bib/000000179080
Bibliographic Record Category (NDL): 213