Deposition of boron and boron nitride films by plasma assisted chemical transport processes

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Deposition of boron and boron nitride films by plasma assisted chemical transport processes

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Material Type: 博士論文
Title: Deposition of boron and boron nitride films by plasma assisted chemical transport processes
Author/Editor: 小松正二郎 [著]
Author Heading: 小松, 正二郎コマツ, ショウジロウ
Extent: 冊
Alternative Title: プラズマ化学輸送法によるホウ素および窒化ホウ素薄膜の堆積に関する研究プラズマカガクユソウホウニヨルホウソオヨビチッカホウソハクマクノタイセキニカンスルケンキュウ
Degree grantor/type: 東京大学
Date Granted: 昭和61年3月29日
Date Granted (W3CDTF): 1986
Dissertation Number: 甲第7077号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-62-G235
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000188893
http://id.ndl.go.jp/bib/000000188893
Bibliographic Record Category (NDL): 213