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Studies on the synthesis of radiation-sensitive polymers and their lithographic application

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Material Type: 博士論文
Title: Studies on the synthesis of radiation-sensitive polymers and their lithographic application
Author/Editor: 名手和男 [著]
Author Heading: 名手, 和男ナテ, カズオ
Alternative Title: 放射線感応性ポリマーの合成とリソグラフィー材料への応用に関する研究ホウシャセンカンノウセイポリマーノゴウセイトリソグラフィーザイリョウエノオウヨウニカンスルケンキュウ
Degree grantor/type: 大阪大学
Date Granted: 昭和62年12月24日
Date Granted (W3CDTF): 1987
Dissertation Number: 乙第4298号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-63-G169
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000197049
http://id.ndl.go.jp/bib/000000197049
Bibliographic Record Category (NDL): 213