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集束イオンビーム技術のマスクレス選択ドーピングプロセスへの応用に関する研究

Call No. (NDL): UT51-63-G279
Bibliographic ID of National Diet Library: 000000197159
Persistent ID (NDL): info:ndljp/pid/12530601

Material type: 博士論文

Author: 宮内榮三 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 大阪大学,工学博士

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Note (General)：: 博士論文

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Material Type: 博士論文
Title: 集束イオンビーム技術のマスクレス選択ドーピングプロセスへの応用に関する研究
Title Transcription: シュウソクイオンビームギジュツノマスクレスセンタクドーピングプロセスエノオウヨウニカンスルケンキュウ
Author/Editor: 宮内榮三 [著]
Author Heading: 宮内, 榮三ミヤウチ, エイゾウ
Degree grantor/type: 大阪大学
Date Granted: 昭和63年3月17日
Date Granted (W3CDTF): 1988
Dissertation Number: 乙第4408号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-63-G279
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000197159
http://id.ndl.go.jp/bib/000000197159
Bibliographic Record Category (NDL): 213