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博士論文

Fundamental study of precise Auger depth profiling for polycrystalline metal films

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Fundamental study of precise Auger depth profiling for polycrystalline metal films

Call No. (NDL)
UT51-63-M77
Bibliographic ID of National Diet Library
000000203442
Persistent ID (NDL)
info:ndljp/pid/12523476
Material type
博士論文
Author
種村眞幸 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
名古屋工業大学,工学博士
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博士論文

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Paper Digital

Material Type
博士論文
Title
Fundamental study of precise Auger depth profiling for polycrystalline metal films
Author/Editor
種村眞幸 [著]
Author Heading
種村, 眞幸 タネムラ, マサキ
Alternative Title
多結晶金属薄膜の精密オージェ・デプス分析に関する基礎研究 タケッショウ キンゾク ハクマク ノ セイミツ オージェ デプス ブンセキ ニ カンスル キソ ケンキュウ
Degree grantor/type
名古屋工業大学
Date Granted
昭和63年3月23日
Date Granted (W3CDTF)
1988
Dissertation Number
甲第4号
Degree Type
工学博士