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博士論文

HR-CVD法(Hydrogen Radical Enhanced CVD法)によるSi膜の作製と特性評価に関する研究

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HR-CVD法(Hydrogen Radical Enhanced CVD法)によるSi膜の作製と特性評価に関する研究

Call No. (NDL)
UT51-63-Q274
Bibliographic ID of National Diet Library
000000205030
Persistent ID (NDL)
info:ndljp/pid/12516712
Material type
博士論文
Author
柴田直樹 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
東京工業大学,工学博士
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Paper Digital

Material Type
博士論文
Title
HR-CVD法(Hydrogen Radical Enhanced CVD法)によるSi膜の作製と特性評価に関する研究
Title Transcription
HR - CVDホウ (Hydrogen Radical Enhanced CVDホウ) ニ ヨル Siマク ノ サクセイ ト トクセイ ヒョウカ ニ カンスル ケンキュウ
Author/Editor
柴田直樹 [著]
Author Heading
柴田, 直樹 シバタ, ナオキ
Degree grantor/type
東京工業大学
Date Granted
昭和63年3月26日
Date Granted (W3CDTF)
1988
Dissertation Number
甲第1941号
Degree Type
工学博士