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CZ法シリコン結晶育成における酸素濃度制御に関する研究

Call No. (NDL): UT51-63-Q310
Bibliographic ID of National Diet Library: 000000205066
Persistent ID (NDL): info:ndljp/pid/12525870

Material type: 博士論文

Author: 干川圭吾 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東京工業大学,工学博士

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Note (General)：: 博士論文

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Material Type: 博士論文
Title: CZ法シリコン結晶育成における酸素濃度制御に関する研究
Title Transcription: CZホウシリコンケッショウイクセイニオケルサンソノウドセイギョニカンスルケンキュウ
Author/Editor: 干川圭吾 [著]
Author Heading: 干川, 圭吾ホシカワ, ケイゴ
Degree grantor/type: 東京工業大学
Date Granted: 昭和62年5月31日
Date Granted (W3CDTF): 1987
Dissertation Number: 乙第1687号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-63-Q310
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000205066
http://id.ndl.go.jp/bib/000000205066
Bibliographic Record Category (NDL): 213