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封じ込め磁界を用いた磁性体高速スパッタ法の開発に関する研究

Call No. (NDL): UT51-63-Q426
Bibliographic ID of National Diet Library: 000000205182
Persistent ID (NDL): info:ndljp/pid/12525876

Material type: 博士論文

Author: 高橋隆一 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東京工業大学,工学博士

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Note (General)：: 博士論文

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Material Type: 博士論文
Title: 封じ込め磁界を用いた磁性体高速スパッタ法の開発に関する研究
Title Transcription: フウジコメジカイオモチイタジセイタイコウソクスパッタホウノカイハツニカンスルケンキュウ
Author/Editor: 高橋隆一 [著]
Author Heading: 高橋, 隆一タカハシ, タカカズ
Degree grantor/type: 東京工業大学
Date Granted: 昭和63年3月31日
Date Granted (W3CDTF): 1988
Dissertation Number: 乙第1803号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-63-Q426
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000205182
http://id.ndl.go.jp/bib/000000205182
Bibliographic Record Category (NDL): 213