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Growth and characterization of semiconductor thin films prepared using microwave discharge

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Material Type: 博士論文
Title: Growth and characterization of semiconductor thin films prepared using microwave discharge
Author/Editor: 茶谷原昭義 [著]
Author Heading: 茶谷原, 昭義チャヤハラ, アキヨシ
Alternative Title: マイクロ波放電による半導体薄膜の製作と特性評価マイクロハホウデンニヨルハンドウタイハクマクノセイサクトトクセイヒョウカ
Degree grantor/type: 広島大学
Date Granted: 昭和63年3月24日
Date Granted (W3CDTF): 1988
Dissertation Number: 甲第709号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-C362
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000210064
http://id.ndl.go.jp/bib/000000210064
Bibliographic Record Category (NDL): 213