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シリコン素子技術におけるイオンビームの応用

Call No. (NDL): UT51-63-U120
Bibliographic ID of National Diet Library: 000000215742
Persistent ID (NDL): info:ndljp/pid/12521378

Material type: 博士論文

Author: 中村邦雄 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東京大学,工学博士

Notes on use

Note (General)：: 博士論文

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Paper Digital

Material Type: 博士論文
Title: シリコン素子技術におけるイオンビームの応用
Title Transcription: シリコンソシギジュツニオケルイオンビームノオウヨウ
Author/Editor: 中村邦雄 [著]
Author Heading: 中村, 邦雄ナカムラ, クニオ
Degree grantor/type: 東京大学
Date Granted: 昭和62年7月9日
Date Granted (W3CDTF): 1987
Dissertation Number: 乙第8465号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-63-U120
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000215742
http://id.ndl.go.jp/bib/000000215742
Bibliographic Record Category (NDL): 213