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Studies on material process related to X-ray lithography

Call No. (NDL): UT51-89-G400
Bibliographic ID of National Diet Library: 000000216504
Persistent ID (NDL): info:ndljp/pid/11598303

Material type: 博士論文

Author: 山田人巳 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 名古屋大学,工学博士

Notes on use

Note (General)：: 博士論文

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Material Type: 博士論文
Title: Studies on material process related to X-ray lithography
Author/Editor: 山田人巳 [著]
Author Heading: 山田, 人巳ヤマダ, ヒトミ
Alternative Title: X線リソグラフィーに関する材料プロセスの研究 Xセンリソグラフィーニカンスルザイリョウプロセスノケンキュウ
Degree grantor/type: 名古屋大学
Date Granted: 平成1年3月25日
Date Granted (W3CDTF): 1989
Dissertation Number: 甲第2189号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-G400
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000216504
http://id.ndl.go.jp/bib/000000216504
Bibliographic Record Category (NDL): 213