The cover of this title could differ from library to library.

The cover of this title could differ from library to library.

Available with Digitized Contents Transmission Service

Find on the publisher's website

国立国会図書館デジタルコレクション

Available for viewing via the Digitized Contents Transmission Service for Individuals to official registered users of the NDL, who resides in Japan.

Become an official registered user >

プラズマドライエッチングの半導体デバイス製作への応用に関する研究

Call No. (NDL): UT51-89-G491
Bibliographic ID of National Diet Library: 000000216595
Persistent ID (NDL): info:ndljp/pid/11598394

Material type: 博士論文

Author: 広部嘉道 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 名古屋大学,工学博士

Notes on use

Note (General)：: 博士論文

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper Digital

Material Type: 博士論文
Title: プラズマドライエッチングの半導体デバイス製作への応用に関する研究
Title Transcription: プラズマドライエッチングノハンドウタイデバイスセイサクエノオウヨウニカンスルケンキュウ
Author/Editor: 広部嘉道 [著]
Author Heading: 広部, 嘉道ヒロベ, カドウ
Degree grantor/type: 名古屋大学
Date Granted: 平成1年3月25日
Date Granted (W3CDTF): 1989
Dissertation Number: 乙第3564号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-G491
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000216595
http://id.ndl.go.jp/bib/000000216595
Bibliographic Record Category (NDL): 213