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Glow discharge sputtering phenomena and the detection of sputtered species for the application to surface spectrochemical analysis

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Material Type: 博士論文
Title: Glow discharge sputtering phenomena and the detection of sputtered species for the application to surface spectrochemical analysis
Author/Editor: Teo Wei Boon [著]
Author Heading: Teo Wei Boon ティオウェイブン
Alternative Title: グロー放電によるスパッタリング現象の原子スペクトル測定とその表面分析への応用グローホウデンニヨルスパッタリングゲンショウノゲンシスペクトルソクテイトソノヒョウメンブンセキエノオウヨウ
Degree grantor/type: 東北大学
Date Granted: 平成1年3月24日
Date Granted (W3CDTF): 1989
Dissertation Number: 甲第4062号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-F244
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000217555
http://id.ndl.go.jp/bib/000000217555
Bibliographic Record Category (NDL): 213