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博士論文

シリコンウェーハにおける金属不純物挙動に関する研究

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シリコンウェーハにおける金属不純物挙動に関する研究

Call No. (NDL)
UT51-89-H417
Bibliographic ID of National Diet Library
000000218881
Persistent ID (NDL)
info:ndljp/pid/11598819
Material type
博士論文
Author
佐野正和 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
大阪大学,工学博士
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博士論文

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Paper Digital

Material Type
博士論文
Title
シリコンウェーハにおける金属不純物挙動に関する研究
Title Transcription
シリコン ウェーハ ニ オケル キンゾク フジュンブツ キョドウ ニ カンスル ケンキュウ
Author/Editor
佐野正和 [著]
Author Heading
佐野, 正和 サノ, マサカズ
Degree grantor/type
大阪大学
Date Granted
平成1年3月2日
Date Granted (W3CDTF)
1989
Dissertation Number
乙第4671号
Degree Type
工学博士