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Studies on thin films of functional polymers for electronic applications : molecular design in focus on EB resist materials

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Material Type: 博士論文
Title: Studies on thin films of functional polymers for electronic applications : molecular design in focus on EB resist materials
Author/Editor: 小口清 [著]
Author Heading: 小口, 清オグチ, キヨシ
Alternative Title: 機能性高分子薄膜のエレクトロニクスへの応用 : EBレジスト材料を中心とした分子設計キノウセイコウブンシハクマクノエレクトロニクスエノオウヨウ : EB レジストザイリョウオチュウシントシタブンシセッケイ
Degree grantor/type: 上智大学
Date Granted: 平成1年7月11日
Date Granted (W3CDTF): 1989
Dissertation Number: 乙第60号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-P276
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000222395
http://id.ndl.go.jp/bib/000000222395
Bibliographic Record Category (NDL): 213