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結晶Siにおけるイオン注入軽元素不純物の挙動に関する研究

Call No. (NDL): UT51-89-R269
Bibliographic ID of National Diet Library: 000000223268
Persistent ID (NDL): info:ndljp/pid/11568124

Material type: 博士論文

Author: 伊藤久義 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 筑波大学,工学博士

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Note (General)：: 博士論文

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Material Type: 博士論文
Title: 結晶Siにおけるイオン注入軽元素不純物の挙動に関する研究
Title Transcription: ケッショウ Si ニオケルイオンチュウニュウケイゲンソフジュンブツノキョドウニカンスルケンキュウ
Author/Editor: 伊藤久義 [著]
Author Heading: 伊藤, 久義イトウ, ヒサヨシ
Degree grantor/type: 筑波大学
Date Granted: 昭和62年3月25日
Date Granted (W3CDTF): 1987
Dissertation Number: 博甲第460号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-R269
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000223268
http://id.ndl.go.jp/bib/000000223268
Bibliographic Record Category (NDL): 213