Characteristics of CH[4]/CF[4] plasma and formation of diamond-like carbon films

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Characteristics of CH[4]/CF[4] plasma and formation of diamond-like carbon films

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Material Type: 博士論文
Title: Characteristics of CH[4]/CF[4] plasma and formation of diamond-like carbon films
Author/Editor: 柳原健児 [著]
Author Heading: 柳原, 健児ヤナギハラ, ケンジ
Alternative Title: メタン/テトラフロロメタンプラズマの特性およびダイヤモンドライクカーボン膜の作製メタン
Degree grantor/type: 広島大学
Date Granted: 平成1年1月23日
Date Granted (W3CDTF): 1989
Dissertation Number: 乙第1789号
Degree Type: 理学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT21
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-89-X195
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000225496
http://id.ndl.go.jp/bib/000000225496
Bibliographic Record Category (NDL): 213