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粒子ビームを用いた半導体の表面処理および微細加工に関する研究

Call No. (NDL): UT51-90-E518
Bibliographic ID of National Diet Library: 000000230317
Persistent ID (NDL): info:ndljp/pid/11391323

Material type: 博士論文

Author: 桑野博喜 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 東北大学,工学博士

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Note (General)：: 博士論文

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Material Type: 博士論文
Title: 粒子ビームを用いた半導体の表面処理および微細加工に関する研究
Title Transcription: リュウシビームオモチイタハンドウタイノヒョウメンショリオヨビビサイカコウニカンスルケンキュウ
Author/Editor: 桑野博喜 [著]
Author Heading: 桑野, 博喜クワノ, ヒロキ
Degree grantor/type: 東北大学
Date Granted: 平成2年3月14日
Date Granted (W3CDTF): 1990
Dissertation Number: 乙第5267号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-90-E518
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000230317
http://id.ndl.go.jp/bib/000000230317
Bibliographic Record Category (NDL): 213