Ⅲ-Ⅴ族化合物半導体へのイオン注入 : Si[+]とSn[+]注入GaAsのキャリヤ活性化機構
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国立国会図書館デジタルコレクション
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- Material Type
- 博士論文
- Title Transcription
- 3 - 5ゾク カゴウブツ ハンドウタイ エ ノ イオン チュウニュウ : Si+ ト Sn+ チュウニュウ GaAs ノ キャリヤ カッセイカ キコウ
- Author/Editor
- 沈泰彦 [著]
- Author Heading
- 沈, 泰彦 シム, テオン
- Alternative Title
- Ion implantation to Ⅲ-Ⅴ compound semiconductor : carrier activation of Si and Sn implanted GaAs
- Degree grantor/type
- 早稲田大学
- Date Granted
- 平成1年6月22日
- Date Granted (W3CDTF)
- 1989
- Dissertation Number
- 甲第801号