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博士論文

Chemical structures and electronic properties of silicon nitride films

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国立国会図書館デジタルコレクション

Chemical structures and electronic properties of silicon nitride films

Call No. (NDL)
UT51-90-L45
Bibliographic ID of National Diet Library
000000231341
Persistent ID (NDL)
info:ndljp/pid/11393707
Material type
博士論文
Author
藤田静雄 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
京都大学,工学博士
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博士論文

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Paper Digital

Material Type
博士論文
Title
Chemical structures and electronic properties of silicon nitride films
Author/Editor
藤田静雄 [著]
Author Heading
藤田, 静雄 フジタ, シズオ
Alternative Title
シリコン窒化膜の化学構造と電子物性に関する研究 シリコン チッカマク ノ カガク コウゾウ ト デンシ ブッセイ ニ カンスル ケンキュウ
Degree grantor/type
京都大学
Date Granted
平成2年5月23日
Date Granted (W3CDTF)
1990
Dissertation Number
乙第7243号
Degree Type
工学博士