Study on physical-chemical interactions between plasma and solid surface for thin film processings

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Study on physical-chemical interactions between plasma and solid surface for thin film processings

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Material Type: 博士論文
Title: Study on physical-chemical interactions between plasma and solid surface for thin film processings
Author/Editor: 山本憲治 [著]
Author Heading: 山本, 憲治ヤマモト, ケンジ
Alternative Title: 薄膜形成プロセッシングにおけるプラズマと表面との物理化学的相互作用に関する研究ハクマクケイセイプロセッシングニオケルプラズマトヒョウメントノブツリカガクテキソウゴサヨウニカンスルケンキュウ
Degree grantor/type: 京都大学
Date Granted: 平成3年3月23日
Date Granted (W3CDTF): 1991
Dissertation Number: 乙第7488号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-91-E265
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000238296
http://id.ndl.go.jp/bib/000000238296
Bibliographic Record Category (NDL): 213