X線リソグラフィマスクの研究

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X線リソグラフィマスクの研究

Call No. (NDL): UT51-91-G356
Bibliographic ID of National Diet Library: 000000240291
Persistent ID (NDL): info:ndljp/pid/3054496

Material type: 博士論文

Author: 鈴木克美 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

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Name of awarding university/degree: 大阪大学,工学博士

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Note (General)：: 博士論文

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Table of Contents

Provided by：国立国会図書館デジタルコレクション

目次
第1章序論
p1
1-1 本研究の背景
p1
1-2 X線リソグラフィ技術の概要
p2
1-3 本研究の目的
p6

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Paper Digital

Material Type: 博士論文
Title: X線リソグラフィマスクの研究
Title Transcription: Xセンリソグラフィマスクノケンキュウ
Author/Editor: 鈴木克美 [著]
Author Heading: 鈴木, 克美スズキ, カツミ
Degree grantor/type: 大阪大学
Date Granted: 平成3年3月14日
Date Granted (W3CDTF): 1991
Dissertation Number: 乙第5380号
Degree Type: 工学博士
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
UT31
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-91-G356
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000240291
http://id.ndl.go.jp/bib/000000240291
Bibliographic Record Category (NDL): 213