Non-destructive analysis using soft X-ray emission spectroscopy (SXES) : application for metal/semiconductor contacts and construction of a new SXES apparatus for surface and interface studies
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Table of Contents
CONTENTS
p4
Chapter1:Introduction
p1
References
p13
Chapter2:Experimental Methods
p14
2.1 Soft X-Ray Emission Spectroscopy:Principles for Grating Monochromator
p14
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- Material Type
- 博士論文
- Author/Editor
- 渡部宏邦 [著]
- Author Heading
- 渡部, 宏邦, 1944- ワタベ, ヒロクニ, 1944- ( 00152365 )Authorities
- Alternative Title
- 軟X線分光法を用いた非破壊分析法とその金属/半導体接合系評価への応用 ナンXセン ブンコウホウ オ モチイタ ヒハカイ ブンセキホウ ト ソノ キンゾク
- Degree grantor/type
- 大阪大学
- Date Granted
- 平成4年2月25日
- Date Granted (W3CDTF)
- 1992
- Dissertation Number
- 乙第5654号
- Degree Type
- 工学博士