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国立国会図書館デジタルコレクション
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Table of Contents
Contents
Acknowledgments
Chapter1 Introduction
p1
1-1 General Remarks
p1
1-2 Background of Previous Work on rf Plasmas for Plasma CVD
p2
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- 横澤亜由美 [著]
- Author Heading
- 横澤, 亜由美 ヨコザワ, アユミ
- Alternative Title
- rf非平衡プラズマのモデリング rf ヒヘイコウ プラズマ ノ モデリング
- Degree grantor/type
- 北海道大学
- Date Granted
- 平成4年3月25日
- Date Granted (W3CDTF)
- 1992
- Dissertation Number
- 甲第3045号
- Degree Type
- 工学博士