An improved RF-driven probe method for RF plasma diagnostics
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国立国会図書館デジタルコレクション
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Table of Contents
Contents
p10
Chapter1
p1
Introduction
p1
1.1.Survey of Langmuir probe measurements in RF discharges
p2
1.2.The basic Phenomena of RF discharge
p6
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- 大澤敦 [著]
- Author Heading
- 大澤, 敦 オオサワ, アツシ
- Alternative Title
- RFプラズマ診断の改良駆動プローブ法 RF プラズマ シンダン ノ カイリョウ クドウ プローブホウ
- Degree grantor/type
- 東京電機大学
- Date Granted
- 平成5年11月1日
- Date Granted (W3CDTF)
- 1993
- Dissertation Number
- 乙第43号
- Degree Type
- 博士 (工学)