半導体産業で使用されているガスの燃焼反応性

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半導体産業で使用されているガスの燃焼反応性

Call No. (NDL): UT51-94-K65
Bibliographic ID of National Diet Library: 000000271538
Persistent ID (NDL): info:ndljp/pid/3076201

Material type: 博士論文

Author: 李相坤 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 横浜国立大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

論文要旨
論文要旨
目次
p1
第1章序論
p1
1.1 はじめに
p1

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Paper Digital

Material Type: 博士論文
Title: 半導体産業で使用されているガスの燃焼反応性
Title Transcription: ハンドウタイサンギョウデシヨウサレテイルガスノネンショウハンノウセイ
Author/Editor: 李相坤 [著]
Author Heading: 李, 相坤イ, サンコン
Degree grantor/type: 横浜国立大学
Date Granted: 平成6年3月25日
Date Granted (W3CDTF): 1994
Dissertation Number: 甲第132号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Alias of Author: Lee, Sang-gon
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-94-K65
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000271538
http://id.ndl.go.jp/bib/000000271538
Bibliographic Record Category (NDL): 213