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国立国会図書館デジタルコレクション

LSIアルミ配線の劣化機構に関する研究

Call No. (NDL): UT51-94-L219
Bibliographic ID of National Diet Library: 000000272192
Persistent ID (NDL): info:ndljp/pid/3076483

Material type: 博士論文

Author: 平岡一則 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

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Name of awarding university/degree: 静岡大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

論文要旨
p1
目次
p1
第1章序論
p1
1.1 LSI技術における配線信頼性研究の位置
p1
1.2 アルミ配線の信頼性研究の経緯
p3

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Paper Digital

Material Type: 博士論文
Title: LSIアルミ配線の劣化機構に関する研究
Title Transcription: LSI アルミハイセンノレッカキコウニカンスルケンキュウ
Author/Editor: 平岡一則 [著]
Author Heading: 平岡, 一則ヒラオカ, カズノリ
Degree grantor/type: 静岡大学
Date Granted: 平成6年6月27日
Date Granted (W3CDTF): 1994
Dissertation Number: 乙第57号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-94-L219
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000272192
http://id.ndl.go.jp/bib/000000272192
Bibliographic Record Category (NDL): 213