博士論文
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Optical properties and molecular orbital analyses of defects in photo-CVD SiO[2] thin films

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Optical properties and molecular orbital analyses of defects in photo-CVD SiO[2] thin films

Call No. (NDL)
UT51-96-E234
Bibliographic ID of National Diet Library
000000294837
Persistent ID (NDL)
info:ndljp/pid/3110097
Material type
博士論文
Author
金島岳 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
大阪大学,博士 (工学)
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博士論文

Table of Contents

  • Abstract

    p1

  • Contents

    p3

  • 1 Introduction

    p1

  • 1.1 Background

    p1

  • 1.2 Purpose of This Work

    p3

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Author/Editor
金島岳 [著]
Author Heading
金島, 岳 カナシマ, タケシ
Alternative Title
光CDV SiO[2]膜中欠陥の光学的性質および分子軌道法による評価 ヒカリ CDV SiO2マクチュウ ケッカン ノ コウガクテキ セイシツ オヨビ ブンシ キドウホウ ニ ヨル ヒョウカ
Degree grantor/type
大阪大学
Date Granted
平成8年3月25日
Date Granted (W3CDTF)
1996
Dissertation Number
甲第5631号
Degree Type
博士 (工学)