低温・低欠陥プラズマCVD法の研究
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Table of Contents
-目次-
p1
第1章.序論
p1
1-1 本研究の背景
p1
1-2 平行平板型プラズマCVD法
p5
1-3 光アシストプラズマCVD(PAP-CVD)法
p11
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- Material Type
- 博士論文
- Title
- Title Transcription
- テイオン テイケッカン プラズマ CVDホウ ノ ケンキュウ
- Author/Editor
- 鈴木伸昌 [著]
- Author Heading
- 鈴木, 伸昌 スズキ, ノブマサ
- Degree grantor/type
- 東北大学
- Date Granted
- 平成8年3月26日
- Date Granted (W3CDTF)
- 1996
- Dissertation Number
- 甲第5642号
- Degree Type
- 博士 (工学)