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国立国会図書館デジタルコレクション

熱CVD成膜過程のモデル解析

Call No. (NDL): UT51-97-W515
Bibliographic ID of National Diet Library: 000000316161
Persistent ID (NDL): info:ndljp/pid/3130971

Material type: 博士論文

Author: 秋山泰伸 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 九州大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

目次
第1章緒論
p1
1.1 CVDの反応解析に対する既往の研究
p1
1.2 本研究の目的
p8
1.3 本論文の構成
p10

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Paper Digital

Material Type: 博士論文
Title: 熱CVD成膜過程のモデル解析
Title Transcription: ネツ CVD セイマクカテイノモデルカイセキ
Author/Editor: 秋山泰伸 [著]
Author Heading: 秋山, 泰伸アキヤマ, ヤスノブ
Degree grantor/type: 九州大学
Date Granted: 平成9年9月25日
Date Granted (W3CDTF): 1997
Dissertation Number: 乙第6532号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-97-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000316161
http://id.ndl.go.jp/bib/000000316161
Bibliographic Record Category (NDL): 213