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高信頼性極薄酸化膜形成の研究

Call No. (NDL): UT51-98-T275
Bibliographic ID of National Diet Library: 000000326944
Persistent ID (NDL): info:ndljp/pid/3141752

Material type: 博士論文

Author: 岩本敏幸 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

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Name of awarding university/degree: 東北大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

目次
第1章序論
p1
1.1 本研究の背景
p1
1.2 本研究の目的
p3
1.3 本研究の概要
p4

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Paper Digital

Material Type: 博士論文
Title: 高信頼性極薄酸化膜形成の研究
Title Transcription: コウシンライセイゴクウスサンカマクケイセイノケンキュウ
Author/Editor: 岩本敏幸 [著]
Author Heading: 岩本, 敏幸イワモト, トシユキ
Degree grantor/type: 東北大学
Date Granted: 平成10年3月25日
Date Granted (W3CDTF): 1998
Dissertation Number: 甲第6435号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-98-T275
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000326944
http://id.ndl.go.jp/bib/000000326944
Bibliographic Record Category (NDL): 213