A study on prediction of solubility speed of photosensitive polymers in alkaline developer by measurement of electrical conductivity of polymer solution in organic solvent
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国立国会図書館デジタルコレクション
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Table of Contents
Contents
Chapter1 Introduction
p1
References
p8
Chapter2 Preparation of a Photoresist Using Polybenzoxazol(PBO)as a Base Polymer
p13
2.1 Introduction
p13
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- Material Type
- 博士論文
- Author/Editor
- 竹田敏郎 [著]
- Author Heading
- 竹田, 敏郎 タケダ, トシロウ
- Alternative Title
- フォトレジストポリマー溶液の電気伝導度測定による現像液への溶解速度の予測に関する研究 フォトレジスト ポリマー ヨウエキ ノ デンキ デンドウド ソクテイ ニ ヨル ゲンゾウエキ エ ノ ヨウカイ ソクド ノ ヨソク ニ カンスル ケンキュウ
- Degree grantor/type
- 東北大学
- Date Granted
- 平成11年3月25日
- Date Granted (W3CDTF)
- 1999
- Dissertation Number
- 甲第6855号
- Degree Type
- 博士(工学)