微結晶シリコンの構造及び欠陥の研究
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Table of Contents
目次
p1
第一章 序論
p2
1-1 本研究の背景
p2
1-2 微結晶シリコンの定義
p3
1-3 微結晶シリコンの分類
p3
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- Material Type
- 博士論文
- Title
- Title Transcription
- ビケッショウ シリコン ノ コウゾウ オヨビ ケッカン ノ ケンキュウ
- Author/Editor
- 惠原貴志 [著]
- Author Heading
- 惠原, 貴志 エハラ, タカシ
- Degree grantor/type
- 東北大学
- Date Granted
- 平成11年1月20日
- Date Granted (W3CDTF)
- 1999
- Dissertation Number
- 乙第7631号
- Degree Type
- 博士(理学)