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国立国会図書館デジタルコレクション

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Characterization of SIMOX (Separation-by-implanted-oxygen) materials and devices

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Material Type: 博士論文
Title: Characterization of SIMOX (Separation-by-implanted-oxygen) materials and devices
Author/Editor: 吉野明 [著]
Author Heading: 吉野, 明ヨシノ, アキラ
Alternative Title: SIMOX基板とSIMOXデバイスの特性評価 SIMOX キバント SIMOX デバイスノトクセイヒョウカ
Degree grantor/type: 慶応義塾大学
Date Granted: 平成11年3月4日
Date Granted (W3CDTF): 1999
Dissertation Number: 乙第3259号
Degree Type: 博士(工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-99-J208
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000335829
http://id.ndl.go.jp/bib/000000335829
Bibliographic Record Category (NDL): 213