Ar,SiH4ガスRF非平衡プラズマの過渡応答解析
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Table of Contents
目次
p1
第1章 序論
p1
1.1 緒言
p1
1.2 RF非平衡プラズマ
p2
1.3 RF電界における荷電粒子の応答
p4
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- Material Type
- 博士論文
- Title Transcription
- Ar SiH4 ガス RF ヒヘイコウ プラズマ ノ カト オウトウ カイセキ
- Author/Editor
- 楊靖 [著]
- Author Heading
- 楊, 靖 ヨウ, セイ
- Degree grantor/type
- 北海道大学
- Date Granted
- 平成11年3月25日
- Date Granted (W3CDTF)
- 1999
- Dissertation Number
- 甲第4766号
- Degree Type
- 博士(理学)