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ナノ構造シリコンデバイス作製技術の研究

Call No. (NDL): UT51-2000-C901
Bibliographic ID of National Diet Library: 000000350216
Persistent ID (NDL): info:ndljp/pid/3165023

Material type: 博士論文

Author: 堤利幸 [著]

Publisher: -

Publication date: -

Material Format: Paper・Digital

Capacity, size, etc.: -

Name of awarding university/degree: 明治大学,博士 (工学)

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Note (General)：: 博士論文

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Table of Contents

目次
p1
第1章序論
p1
1.1 本研究の背景と意義
p1
1.2 本研究の目的と構成
p9
参考文献(第1章)
p13

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Paper Digital

Material Type: 博士論文
Title: ナノ構造シリコンデバイス作製技術の研究
Title Transcription: ナノコウゾウシリコンデバイスサクセイギジュツノケンキュウ
Author/Editor: 堤利幸 [著]
Author Heading: 堤, 利幸ツツミ, トシユキ
Degree grantor/type: 明治大学
Date Granted: 平成12年3月26日
Date Granted (W3CDTF): 2000
Dissertation Number: 甲第218号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2000-C901
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000000350216
http://id.ndl.go.jp/bib/000000350216
Bibliographic Record Category (NDL): 213