博士論文
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New specimen preparation methods for high-resolution electron microscopy and compositional analysis of a DRAM

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New specimen preparation methods for high-resolution electron microscopy and compositional analysis of a DRAM

Call No. (NDL)
UT51-2000-G277
Bibliographic ID of National Diet Library
000000353516
Persistent ID (NDL)
info:ndljp/pid/3168323
Material type
博士論文
Author
川崎正博 [著]
Publisher
-
Publication date
-
Material Format
Paper・Digital
Capacity, size, etc.
-
Name of awarding university/degree
京都工芸繊維大学,博士 (工学)
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Notes on use

Note (General):

博士論文

Table of Contents

  • Contents

    p19

  • Chapter1

    p1

  • New specimen preparation methods

    p1

  • 1-1.Photo-resist method

    p5

  • 1-2.Ni(P) electroless plating method

    p19

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Author/Editor
川崎正博 [著]
Author Heading
川崎, 正博 カワサキ, マサヒロ
Degree grantor/type
京都工芸繊維大学
Date Granted
平成10年11月24日
Date Granted (W3CDTF)
1998
Dissertation Number
乙第72号
Degree Type
博士 (工学)
Note (Dissertation)
博士論文