Studies on reaction mechanisms in chemically amplified resists
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Table of Contents
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Contents
p5
General Introduction
p1
An Introduction to Microelectronic Fabrication by Using Resist Processes
p1
Next Generation Lithography
p2
Objective of This Study
p3
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- Material Type
- 博士論文
- Author/Editor
- 永原誠司 [著]
- Author Heading
- 永原, 誠司 ナガハラ, セイジ
- Alternative Title
- 化学増幅型レジストの反応機構の研究 カガク ゾウフクガタ レジスト ノ ハンノウ キコウ ノ ケンキュウ
- Degree grantor/type
- 大阪大学
- Date Granted
- 平成12年3月24日
- Date Granted (W3CDTF)
- 2000
- Dissertation Number
- 甲第7436号
- Degree Type
- 博士 (工学)