微細構造物としてのLSI配線の破壊機構に関する研究
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Table of Contents
論文目録
目次
p1
第1章 緒論
p1
1.1 微細構造物の破壊
p1
1.2 微細構造物としてのLSI配線の破壊
p3
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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- ビサイ コウゾウブツ ト シテ ノ LSI ハイセン ノ ハカイ キコウ ニ カンスル ケンキュウ
- Author/Editor
- 澁谷忠弘 [著]
- Author Heading
- 澁谷, 忠弘 シブタニ, タダヒロ
- Publication, Distribution, etc.
- Publication Date
- 2000
- Publication Date (W3CDTF)
- 2000
- Extent
- 1冊
- Degree grantor/type
- 京都大学