博士論文

シリコン表面の窒化反応に関する研究

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シリコン表面の窒化反応に関する研究

Call No. (NDL)
UT51-2000-S264
Bibliographic ID of National Diet Library
000000393505
Persistent ID (NDL)
info:ndljp/pid/3177232
Material type
博士論文
Author
石塚真治 [著]
Publisher
[石塚真治]
Publication date
1998
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (理学)
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博士論文

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Table of Contents

  • 目次

    p1

  • 第1章 序論

    p1

  • 1.1 はじめに

    p1

  • 1.2 窒化ケイ素

    p3

  • 1.3 研究の背景及び目的

    p3

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
シリコン表面の窒化反応に関する研究
Title Transcription
シリコン ヒョウメン ノ チッカ ハンノウ ニ カンスル ケンキュウ
Author/Editor
石塚真治 [著]
Author Heading
石塚, 真治 イシズカ, シンジ
Publication, Distribution, etc.
[石塚真治]
Publication Date
1998
Publication Date (W3CDTF)
1998
Extent
1冊
Degree grantor/type
東北大学