博士論文

Si-Ge-N系の単原子層成長制御の研究

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Si-Ge-N系の単原子層成長制御の研究

Call No. (NDL)
UT51-2000-S283
Bibliographic ID of National Diet Library
000000393553
Persistent ID (NDL)
info:ndljp/pid/3177279
Material type
博士論文
Author
渡辺健 [著]
Publisher
[渡辺健]
Publication date
[1999]
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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博士論文

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Table of Contents

  • 目次

  • 第1章 序論

    p1

  • 1.1 本研究の背景

    p1

  • 1.2 本研究の目的

    p3

  • 参考文献

    p4

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
Si-Ge-N系の単原子層成長制御の研究
Title Transcription
Si - Ge - N ケイ ノ タンゲンシソウ セイチョウ セイギョ ノ ケンキュウ
Author/Editor
渡辺健 [著]
Author Heading
渡辺, 健 ワタナベ, タケシ
Publication, Distribution, etc.
[渡辺健]
Publication Date
[1999]
Publication Date (W3CDTF)
1999
Extent
1冊
Degree grantor/type
東北大学