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博士論文
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光リソグラフィ技術の超高解像化と超高精度化に関する研究

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光リソグラフィ技術の超高解像化と超高精度化に関する研究

Call No. (NDL)
UT51-2000-T45
Bibliographic ID of National Diet Library
000000394684
Persistent ID (NDL)
info:ndljp/pid/3178144
Material type
博士論文
Author
大塚博 [著]
Publisher
[大塚博]
Publication date
1999
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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博士論文

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Table of Contents

  • 目次

    p1

  • 第1章 序論

    p1

  • 1.1 超LSIにおける微細化要求の背景

    p1

  • 1.2 本研究の目的

    p2

  • 1.3 本論文の構成

    p3

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
光リソグラフィ技術の超高解像化と超高精度化に関する研究
Title Transcription
ヒカリ リソグラフィ ギジュツ ノ チョウコウカイゾウカ ト チョウコウセイドカ ニ カンスル ケンキュウ
Author/Editor
大塚博 [著]
Author Heading
大塚, 博 オオツカ, ヒロシ
Publication, Distribution, etc.
[大塚博]
Publication Date
1999
Publication Date (W3CDTF)
1999
Extent
1冊
Degree grantor/type
東北大学