博士論文

多結晶シリコンの不均一非晶質化および結晶化過程の研究

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多結晶シリコンの不均一非晶質化および結晶化過程の研究

Call No. (NDL)
UT51-2001-E652
Bibliographic ID of National Diet Library
000000399901
Persistent ID (NDL)
info:ndljp/pid/3182319
Material type
博士論文
Author
武田光博 [著]
Publisher
[武田光博]
Publication date
[2001]
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
北海道大学,博士 (工学)
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博士論文

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Table of Contents

  • 目次

  • 1.序論

    p1

  • 1-1 緒言

    p1

  • 1-2 非晶質の作製法

    p5

  • 1-3 イオン注入法

    p6

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title
多結晶シリコンの不均一非晶質化および結晶化過程の研究
Title Transcription
タケッショウ シリコン ノ フキンイツ ヒショウシツカ オヨビ ケッショウカ カテイ ノ ケンキュウ
Author/Editor
武田光博 [著]
Author Heading
武田, 光博 タケダ, ミツヒロ
Publication, Distribution, etc.
[武田光博]
Publication Date
[2001]
Publication Date (W3CDTF)
2001
Extent
1冊
Degree grantor/type
北海道大学