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博士論文

高周波駆動マイクロセルプラズマの基礎特性

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高周波駆動マイクロセルプラズマの基礎特性

Call No. (NDL)
UT51-2001-F578
Bibliographic ID of National Diet Library
000000400595
Persistent ID (NDL)
info:ndljp/pid/3182933
Material type
博士論文
Author
栗原優 [著]
Publisher
[栗原優]
Publication date
[2001]
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
慶応義塾大学,博士 (工学)
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博士論文

Table of Contents

Provided by:国立国会図書館デジタルコレクションLink to Help Page
  • 論文目録

  • 目次

    p1

  • 1 序論

    p1

  • 1.1 始めに

    p2

  • 1.2 マイクロプラズマ

    p3

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Bibliographic Record

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Paper Digital

Material Type
博士論文
Title Transcription
コウシュウハ クドウ マイクロセル プラズマ ノ キソ トクセイ
Author/Editor
栗原優 [著]
Author Heading
栗原, 優 クリハラ, マサル
Publication, Distribution, etc.
Publication Date
[2001]
Publication Date (W3CDTF)
2001
Extent
1冊
Degree grantor/type
慶応義塾大学